Sputter Coaters and SEM/TEM Carbon Coaters

Sputter coating is the standard method for preparing non-conducting or poorly conducting specimens for observation in a scanning electron microscope (SEM). We offer low-cost, rotary-pumped systems for depositing non-oxidising metals - such as gold (Au) and platinum (Pt) - and also turbomolecular-pumped models, suitable for oxidising and non-oxidising metals - such as chromium (Cr). Large chamber models are available for specimens up to 8?/200mm diameter, and all sputter coaters can be fitted with carbon evaporation attachments.

For thin film applications, the Q300T D Dual Target Sequential Sputtering System allows consecutive metal layers to be deposited, without the need to break vacuum. 

The Q150T is suitable for SEM, TEM and many thin film applications. It is available in three formats - as a sputter coater, carbon coater or both - and replaces previous models K575X and K950X. 

The compact rotary-pumped Q150R is a coating system suitable for SEM sputtering with noble metals and carbon coating SEM specimens for EDS and WDS. It replaces previous models K500X and K550X.

For larger specimens, the Q300R T (rotary-pumped) and Q300T T (turbo-pumped) models allow coating of a single large diameter specimen up to 8?/200mm (eg a wafer), or multiple smaller specimens over a similar diameter. Both have triple sputtering heads to ensure even metal deposition.